Non-energy-related GHG emissions (CO2, CH4, and N2O), HFC, PFC, SF6, and NF3
(Unit:t-CO2)
FY2018
FY2019
FY2020
FY2021
FY2022
Non-energy-related CO2
0
0
0
0
0
Non-energy-related CH4
4,835
2,907
6
3
0
Non-energy-related N2O
501
215
143
36
0
HFC
4,715
356
362
122
0
PFC
16,383
16,383
6,017
4,088
0
SF6
4,606
4,606
4,617
3,694
0
NF3
52
52
24
12
0
Total
31,092
24,519
11,169
7,955
0
*[Boundary] All global sites
*Due to the business transfer of semiconductor and Micro Electro Mechanical Systems (MEMS) factory and MEMS development and production functions, "GHG emissions other than energy-related CO2" in semiconductor production processes became zero in fiscal 2022.